AMAT 0090-05596 High-Voltage DC Power Cable Assembly

AMAT 0090-05596 | High-Voltage DC Power Cable Assembly

Introduction

The AMAT 0090-05596 is a specialized High-Voltage (HV) DC Power Cable Assembly designed by Applied Materials.

This component is engineered to provide safe and reliable electrical transmission in high-vacuum environments, specifically for the Endura and Centura PVD (Physical Vapor Deposition) platforms.

It is primarily utilized to deliver high-voltage DC power to the Electrostatic Chuck (ESC) or the cathode assembly, where consistent voltage is necessary for substrate clamping and plasma stability.

Technical Parameter Table

Attribute    Specification

Unique Product Description

The AMAT 0090-05596 is a precision-manufactured interconnect solution built for the rigorous electrical demands of semiconductor fabrication.

Unlike standard industrial cables, this assembly features a multi-layer dielectric insulation system designed to eliminate leakage currents and prevent "corona discharge" in low-pressure vacuum environments.

The cable is jacketed in a chemical-resistant, low-outgassing material that ensures vacuum integrity and prevents chamber contamination.

Its flexible core is optimized for the tight routing requirements within the mainframe chassis, providing a high-integrity link between the HV power supply and the process chamber.

Product Advantages and Features

Dielectric Integrity: Exceptional insulation resistance prevents arcing and voltage breakdown at high potentials.

Vacuum Compatibility: Constructed using low-outgassing materials that meet stringent ultra-high vacuum (UHV) requirements.

EMI Suppression: Integrated shielding reduces the impact of external radio frequency (RF) noise on the DC signal.

Durability: Engineered to withstand the thermal cycling and mechanical stresses of high-volume manufacturing (HVM).

Direct OEM Fit: Ensures exact electrical length and connector compatibility, eliminating the need for system modifications.

Related Models

AMAT 0090-05595: Complementary signal feedback cable.

AMAT 0010-11239: High-voltage power interface assembly.

AMAT 0010-20011: ESC (Electrostatic Chuck) Power Supply module.

AMAT 0090-01809: RF power cable (used in the same chamber environment).

Other Models in the Same Series

The 0090-xxxxx series includes various cabling and interconnect solutions for AMAT mainframes:

0090-05597: High-temperature variant for heater applications.

0090-05112: Low-profile HV DC interface.

0090-06000: Multi-conductor control cable for chamber sensors.

Application Cases

Electrostatic Chuck (ESC) Power: Delivering the high-voltage DC charge required to securely clamp silicon wafers during sputtering.

Cathode Bias: Providing the necessary DC bias for target ionization in PVD metal deposition processes.

Refurbishment Projects: Replacing aged or degraded HV cables in 200mm tools to improve voltage stability and yield.

Installation and Maintenance

Installation:

Safety Clearance: Always verify that the high-voltage power supply is turned off and the residual charge is discharged before installation.

Handling: Handle with cleanroom gloves; avoid touching the connector pins to prevent skin oils from creating conductive paths.

Routing: Avoid sharp bends that could compromise the internal dielectric shielding.

Maintenance:

Contamination Check: Periodically inspect the connectors for dust or debris, which can cause high-voltage "tracking" or arcing.

Insulation Test: Perform periodic Megohmmeter (Hi-Pot) testing during scheduled PM to ensure insulation remains within spec.

Connector Care: Inspect the pins for signs of pitting or thermal discoloration, which may indicate a loose or high-resistance connection.