LAM RESEARCH VECTOR EXTREME (model: 61-428059-00) is a kind of etching machine and debonding machine equipment used in semiconductor manufacturing. The equipment has the following characteristics:
High precision and batch consistency: through the design of three modules, the batch production of high-precision patterns can be realized, while ensuring uniform etching and batch consistency.
Automation and flexibility: support highly automated operation, allow users to customize etching profile parameters to meet specific requirements, and have iterative scanning function to quickly adjust parameters.
High-efficiency filtration system: integrated scanning filtration system to reduce blockage and keep stable operation.
Advanced cooling technology: unique environmental medium design improves cooling capacity and reduces substrate warping.
Proprietary nozzle technology: realize uniform distribution etching in the drawing process.
The equipment is suitable for zoom lithography applications, with a process repeatability of over 1% and a minimum line width of 30nm. In addition, its design aims to reduce costs and improve production efficiency.
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