LAM ASM,EIOC CONTA mini 853-150806-001

LAM 853-150806-001 is a high-precision spectrometer module produced by Lam Research Company, which belongs to ASM and EIOC CONTA MINI series. It is specially designed for semiconductor manufacturing equipment to accurately measure and control the composition of semiconductor materials. This module is widely used in etching process, material composition measurement and quality control, and is an indispensable key component in semiconductor manufacturing.

Product characteristics and technical parameters

LAM 853-150806-001 module uses advanced light source to illuminate the sample, and measures the amount of light absorbed or emitted by the sample through the detector, thus achieving accurate measurement of the material composition. Its main technical parameters include:

Applicable wafer size: 8 inches

Working voltage: 220V.

Output frequency: 50kHz

Module size: 100mm x 100mm x 10mm

Weight: about 1kg

Material: ceramics

Certification: CE, RoHS, WEEE

The module has the characteristics of high precision, high reliability and high efficiency, and adopts mature technology to ensure long-term stable operation.

Application scenarios and advantages

LAM 853-150806-001 module is widely used in semiconductor manufacturing, especially in etching process and material composition measurement. Its high-precision measurement ability can significantly improve production efficiency and product quality, while reducing production costs. In addition, the compact and durable design of the module enables it to be easily integrated into the existing manufacturing system without extra space or complicated installation process.

Industry recognition and reliability

As a module that has been strictly tested and certified, LAM 853-150806-001 has obtained many international certifications (such as CE, RoHS and WEEE), which shows that it conforms to industry standards and has high reliability. In addition, its advanced signal processing technology and stable performance make it an important tool in the field of semiconductor manufacturing.

summary

LAM 853-150806-001 high-precision spectrometer module has become an indispensable part of semiconductor manufacturing equipment because of its excellent performance and reliability. Whether it is used for precise control of etching process or for quality assurance of material composition measurement, this module shows its irreplaceable value. It is a wise and necessary choice to choose LAM 853-150806-001 for semiconductor manufacturers pursuing high efficiency and high quality production.