XLFD-160D-X1236 SMC aluminum profile high vacuum angle valve

SMC aluminum profile high vacuum angle valve XLFD-160D-X1236 is a normally closed single-acting high vacuum angle valve, which is designed with aluminum valve body and has excellent heat conduction performance and lightweight characteristics. Its overall structure is compact, suitable for high vacuum environment, especially suitable for semiconductor, solar energy and other high-tech fields.

The valve is sealed by O-ring, which ensures low gas leakage rate and effectively avoids wafer pollution. The aluminum valve body not only has light weight, but also has excellent fluorine corrosion resistance. At the same time, due to its low sputtering yield and no heavy metal, the risk of wafer pollution is further reduced.

XLFD series valves support a variety of maintenance components to extend service life. At the same time, standard FKM sealing materials and 8 additional sealing compound options are provided to meet different chemical compatibility requirements.

. In addition, this series of valves also supports the installation of automatic switches from four directions, and can be equipped with heaters from 100°C to 150°C (in line with UL standards) to adapt to different temperature requirements.

SMC XLFD-160D-X1236 high vacuum angle valve has become an indispensable key component in high vacuum system because of its excellent performance and flexible configuration options.

Related models

Standard model (aluminum body, O-ring seal)

XLF (basic model)

XLFD-160D-X1236 (with heater option)

XLFS-160D (special sealed version)

XLA (enhanced corrosion resistance, suitable for strong acid/alkali environment)

XLE (economical, simplified maintenance design)

Step 2 classify by size

Model Sample Diameter (mm) Remarks on Applicable Vacuum Degree (PA)

XLF-040D4 ≤ 10 microvalve for laboratory use.

Xlf-100d10 ≤ 10 universal type

XLF-160D16 ≤ 10 large flow (e.g. XLFD-160D)

Xlf-250d25 ≤ 10 industrial high load

3. Special function model

Heating options:

XLF-160D-X1236* (with 100 c ~ 150 c ul certified heater)

Sealing options:

-FKM (standard fluororubber seal)

-EPDM (acid and alkali resistance), -FFKM (perfluoroether rubber, ultra-high purity)

Control mode:

-A (pneumatic pilot), -E (electric drive)

4. Compatible accessory models

Bracket/connector: XLF-M4 (adapted to M4 interface) and XLF-KF16(KF flange connection)

Maintenance kit: XLF-RK (including O-rings, piston rings and other wearing parts)