AMAT 0021-26609 SHUTTER DISK,A101,TTN, center needle

AMAT 0021-26609 SHUTTER DISK: The Core Component of Precision Semiconductor Equipment

In the field of semiconductor manufacturing, Endura® Amber™ PVD system of Applied Materials(AMAT) has become the industry benchmark with its revolutionary Copper Reflow Technology. As one of the key components of the system, SHUTTER DISK (model 0021-26609) plays an irreplaceable role in ensuring process accuracy and equipment stability.

Core functions and technical features

Precision control

The shutter disc is specially designed for high vacuum physical vapor deposition (PVD) process, and works in cooperation with A101 cavity and TTN(Turbo-Thermal Needle) center needle to precisely control the material flow direction in the deposition process and avoid the problem of voids in the copper layer structure.

Refer to the AMAT technical documentation, and its design supports extremely narrow depth-width ratio structure filling below 1Xnm nodes, which meets the manufacturing requirements of advanced logic and memory devices.

Materials and reliability

Special alloy materials with high temperature resistance and corrosion resistance are adopted to adapt to the extreme environment (such as high temperature plasma) in PVD process.

The design of the Center Needle optimizes the capillary action of copper atoms, ensuring that copper is evenly filled from the bottom up, which is complementary to the selective PVD technology of Endura CuBS RFX system.

Application scenario

As a standard component of the Tool of Record, this component has been deployed in more than 30 process chambers around the world, and has been used in production lines by leading logic/memory manufacturers.

It is suitable for the manufacture of multi-layer copper interconnection structures (over 60 miles of wiring and 10 billion vertical connections) and solves the yield challenge of nodes below 20nm.