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Home ⊙ AMAT Applied Materials ⊙ AMAT 0040-54755丨0041-75950 applicator, ASP, low heat exchange

AMAT 0040-54755丨0041-75950 applicator, ASP, low heat exchange

From: | Author:kongjiang | Time :2025-05-20 | 18 Browse: | Share:

MAT 0040-54755 & 0041-75950 Technical Description of Low Heat Exchange Applicator

1. Product overview

Applied Materials (Amat) 0040-54755 and 0041-75950 are low-heat exchanger components specially designed for semiconductor manufacturing equipment, belonging to Advanced Semiconductor Processing (ASP) product line. These components are mainly used in precision temperature control process to ensure a stable thermal environment in sensitive processes.

2. Key features

2.1 thermal performance optimization

Low heat exchange design: minimize thermal interference in the process chamber

Accurate temperature control: maintain the temperature stability of 0.5 C.

Fast thermal response: optimizing heat conduction path design

2.2 Mechanical design

Material: special aluminum alloy+ceramic composite.

Surface treatment: anodic oxidation corrosion-resistant coating.

Sealing grade: Class 100 clean room compatible.

2.3 compatibility

Adapting AMAT Endura® and Centura® platforms

Support 200mm/300mm wafer processing.

Compatible with various process gases.

3. Comparison of technical specifications

Parameter 0040-54755 0041-75950

Operating temperature range is 50-450 C 50-500 C.

Heat exchange coefficient < 5w/MK < 3w/MK

Service life > 50,000 cycles > 75,000 cycles

Applicable process CVD/PVD ALD/Epitaxy

4. Application advantages

Reducing the influence of thermal budget fluctuation on thin film deposition

Improve process repeatability and uniformity.

Reduce the frequency of equipment maintenance



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